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1

Spin-on carbon based on fullerene derivatives as hardmask materials for high-aspect-ratio etching

Frommhold, Andreas, Palmer, Richard E., Robinson, Alex P. G.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2013

Language:

english

File:

PDF, 2.96 MB

english, 2013

2

Religious Belief as a Coping Strategy

Gerhild Becker, Felix Momm, Carola Xander, Susanne Bartelt, Anja Zander-Heinz, Kai Budischewski, Claudia Domin, Michael Henke, Irenäus A. Adamietz, Hermann Frommhold

Journal:

Strahlentherapie und Onkologie

Year:

2006

Language:

english

File:

PDF, 437 KB

english, 2006

3

Dynamic absorption coefficients of chemically amplified resists and nonchemically amplified resists at extreme ultraviolet

Fallica, Roberto, Stowers, Jason K., Grenville, Andrew, Frommhold, Andreas, Robinson, Alex P. G., Ekinci, Yasin

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2016

Language:

english

File:

PDF, 1015 KB

english, 2016

4

Performance of negative tone chemically amplified fullerene resists in extreme ultraviolet lithography

Frommhold, Andreas, Yang, Dongxu, McClelland, Alexandra, Xue, Xiang, Ekinci, Yasin, Palmer, Richard E., Robinson, Alex P. G.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2013

Language:

english

File:

PDF, 2.50 MB

english, 2013

5

Is Sonoluminescence due to Collision-Induced Emission?

Frommhold, Lothar, Atchley, Anthony A.

Journal:

Physical Review Letters

Year:

1994

Language:

english

File:

PDF, 271 KB

english, 1994

6

Understanding the Significance of Local Variability in Defect-Aware Process Windows

Maslow, Mark John, Yaegashi, Hidetami, Frommhold, Andreas, Hara, Arisa, Cerbu, Dorin

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2020

Language:

english

File:

PDF, 4.43 MB

english, 2020

7

Acoustic Performance of Membrane Absorbers

W. Frommhold, H.V. Fuchs, S. Sheng

Journal:

Journal of Sound and Vibration

Year:

1994

File:

PDF, 478 KB

1994

8

Simplified methods to calculate the attenuation of silencers

W. Frommhold, F.P. Mechel

Journal:

Journal of Sound and Vibration

Year:

1990

Language:

english

File:

PDF, 1.45 MB

english, 1990

9

Program for the computation of absorptive silencers in straight ducts

P. Brandstätt, W. Frommhold, M.J. Fisher

Journal:

Applied Acoustics

Year:

1994

Language:

english

File:

PDF, 1.48 MB

english, 1994

10

Mental health and patterns of work-related coping behaviour in a German sample of student teachers: a cross-sectional study

Linda Zimmermann, Thomas Unterbrink, Ruth Pfeifer, Michael Wirsching, Uwe Rose, Ulrich Stößel, Matthias Nübling, Veronika Buhl-Grießhaber, Markus Frommhold, Uwe Schaarschmidt, Joachim Bauer

Journal:

International Archives of Occupational and Environmental Health

Year:

2012

Language:

english

File:

PDF, 345 KB

english, 2012

11

Die Familienstiftung

Georg Frommhold

Journal:

Archiv fuer die civilistische Praxis

Year:

1919

File:

PDF, 3.49 MB

1919

12

[IEEE 2012 IEEE 12th International Conference on Nanotechnology (IEEE-NANO) - Birmingham, United Kingdom (2012.08.20-2012.08.23)] 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO) - Chemically amplified fullerene resists, spin-on fullerene hardmasks and high aspect ratio etching

Frommhold, Andreas, Yang, Dong X., Manyam, Jedsada, Manickam, Mayanditheuar, Tarte, Edward, Preece, Jon A., Palmer, Richard E., Robinson, Alex P.G.

Year:

2012

Language:

english

File:

PDF, 1.58 MB

english, 2012

13

Sound Power Determination in Rectangular Flow Ducts

W. Neise, W. Frommhold, F.P. Mechel, F. Holste

Journal:

Journal of Sound and Vibration

Year:

1994

File:

PDF, 1.02 MB

1994

14

Imagery, concreteness, goodness, and familiarity ratings for 500 proverbs sampled from theOxford Dictionary of English Proverbs

John Benjafield, Kris Frommhold, Tom Keenan, Ron Muckenheim, Dierk Mueller

Journal:

Behavior Research Methods

Year:

1993

Language:

english

File:

PDF, 1.24 MB

english, 1993

15

High-speed monodisperse droplet generation by ultrasonically controlled micro-jet breakup

Frommhold, Philipp Erhard, Lippert, Alexander, Holsteyns, Frank Ludwig, Mettin, Robert

Journal:

Experiments in Fluids

Year:

2014

Language:

english

File:

PDF, 2.75 MB

english, 2014

16

106 High-dose therapy with etoposide, ifosfamide, carboplatin, and epirubicin (VIC-E) in non-small cell lung cancer (NSCLC)

Fetscher, S., Brugger, W., Engelhardt, R., Kanz, L., Hasse, J., Frommhold, H., Wenger, M., Mertelsmann, R., Lange, W.

Journal:

Year:

1997

Language:

english

File:

PDF, 145 KB

english, 1997

17

Fullerene-based spin-on-carbon hardmask

Frommhold, A., Manyam, J., Palmer, R.E., Robinson, A.P.G.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 974 KB

english, 2012

18

Electron-atom bremsstrahlung and the sonoluminescence of rare gas bubbles

Frommhold, Lothar

Journal:

Physical Review E

Year:

1998

Language:

english

File:

PDF, 160 KB

english, 1998

19

Dynamics of high-speed micro-drop impact: numerical simulations and experiments at frame-to-frame times below 100 ns

Visser, Claas Willem, Frommhold, Philipp Erhard, Wildeman, Sander, Mettin, Robert, Lohse, Detlef, Sun, Chao

Journal:

Year:

2015

Language:

english

File:

PDF, 6.54 MB

english, 2015

20

The collision induced spectroscopies

Borysow, Jacek, Moraldi, Massimo, Frommhold, Lothar

Journal:

Molecular Physics

Year:

1985

Language:

english

File:

PDF, 537 KB

english, 1985

21

NEW H 2 COLLISION-INDUCED ABSORPTION AND NH 3 OPACITY AND THE SPECTRA OF THE COOLEST BROWN DWARFS

Saumon, Didier, Marley, Mark S., Abel, Martin, Frommhold, Lothar, Freedman, Richard S.

Journal:

The Astrophysical Journal

Year:

2012

Language:

english

File:

PDF, 1.21 MB

english, 2012

22

Zur Geschichte des fränkischen Rechts in Schlesien

Frommhold, Georg

Journal:

Zeitschrift der Savigny-Stiftung für Rechtsgeschichte. Germanistische Abteilung

Year:

1892

Language:

german

File:

PDF, 258 KB

german, 1892

23

Zur Geschichte der gesamten Hand

Frommhold, Georg

Journal:

Zeitschrift der Savigny-Stiftung für Rechtsgeschichte. Germanistische Abteilung

Year:

1916

Language:

german

File:

PDF, 128 KB

german, 1916

24

Zur Geschichte des Familien-Vorkaufsrechts

Frommhold, Georg

Journal:

Zeitschrift der Savigny-Stiftung für Rechtsgeschichte. Germanistische Abteilung

Year:

1911

Language:

german

File:

PDF, 55 KB

german, 1911

25

[Zur Klage mit dem toten Mann und mit der toten Hand]

Frommhold, Georg

Journal:

Zeitschrift der Savigny-Stiftung für Rechtsgeschichte. Germanistische Abteilung

Year:

1915

Language:

german

File:

PDF, 140 KB

german, 1915

26

In-shoe plantar pressure distribution and lower extremity muscle activity patterns of backward compared to forward running on a treadmill

Sterzing, Thorsten, Frommhold, Clivia, Rosenbaum, Dieter

Journal:

Year:

2016

Language:

english

File:

PDF, 1.34 MB

english, 2016

27

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Advanced Etch Technology for Nanopatterning II - Spin-on-carbon hardmask based on fullerene derivatives for high-aspect ratio etching

Frommhold, A., Palmer, R. E., Robinson, A. P. G., Zhang, Ying, Oehrlein, Gottlieb S., Lin, Qinghuang

Year:

2013

Language:

english

File:

PDF, 700 KB

english, 2013

28

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Extreme Ultraviolet (EUV) Lithography VII - Optimization and sensitivity enhancement of high-resolution molecular resist for EUV lithography

Panning, Eric M., Goldberg, Kenneth A., Frommhold, Andreas, McClelland, Alexandra, Roth, John, Fallica, Roberto A., Ekinci, Yasin, Robinson, Alex P. G.

Year:

2016

Language:

english

File:

PDF, 5.50 MB

english, 2016

29

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Advanced Etch Technology for Nanopatterning - High aspect ratio etching using a fullerene derivative spin-on-carbon hardmask

Frommhold, A., Manyam, J., Palmer, R. E., Robinson, A. P. G., Zhang, Ying

Year:

2012

Language:

english

File:

PDF, 5.45 MB

english, 2012

30

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Extreme Ultraviolet (EUV) Lithography VIII - Sensitivity enhancement of the high-resolution xMT molecular resist for EUV lithography

Panning, Eric M., Goldberg, Kenneth A., Popescu, Carmen, Frommhold, Andreas, McClelland, Alexandra L., Roth, John, Ekinci, Yasin, Robinson, Alex P. G.

Year:

2017

Language:

english

File:

PDF, 1.62 MB

english, 2017

31

Is sonoluminescence collision‐induced emission?

Frommhold, Lothar, Atchley, Anthony A.

Journal:

The Journal of the Acoustical Society of America

Year:

1994

Language:

english

File:

PDF, 470 KB

english, 1994

32

Combined radiation and chemotherapy for locally advanced transitional cell carcinoma of the urinary bladder

Gerhard Jakse, Herman Frommhold, Dieter Zur Nedden

Journal:

Year:

1985

Language:

english

File:

PDF, 528 KB

english, 1985

33

Akustische Leckortung bei Fernwärmeleitungen

Prof. Dr. H. V. Fuchs, Dr. W. Frommhold, Dr. R. Poggemann, Dr. P. Zenker

Journal:

Chemie Ingenieur Technik

Year:

1991

Language:

german

File:

PDF, 299 KB

german, 1991

34

α2,3-Sialyltransferase-IV is essential for L-selectin ligand function in inflammation

Markus Sperandio, David Frommhold, Inna Babushkina, Lesley G. Ellies, Timothy S. Olson, Michael L. Smith, Benedikt Fritzsching, Eva Pauly, David F. Smith, Rainer Nobiling, Otwin Linderkamp, Jamey D. M

Journal:

European Journal of Immunology

Year:

2006

Language:

english

File:

PDF, 188 KB

english, 2006

35

A mathematical study of the electron decay in diffusion and recombination controlled afterglows

Lothar Frommhold, Manfred A Biondi

Journal:

Annals of Physics

Year:

1968

Language:

english

File:

PDF, 1.55 MB

english, 1968

36

Raman Spectra and polarizability of the neon diatom

Lothar Frommhold, Michael H. Proffitt

Journal:

Chemical Physics Letters

Year:

1979

Language:

english

File:

PDF, 290 KB

english, 1979

37

The collision-induced far-infrared absorption band of gaseous methane in the region 30–900 cm−1

George Birnbaum, Lothar Frommhold, L. Nencini, H. Sutter

Journal:

Chemical Physics Letters

Year:

1983

Language:

english

File:

PDF, 417 KB

english, 1983

38

Collision-induced raman scattering by anisotropic molecules (H2, D2)

Michael S. Brown, Michael H. Proffitt, Lothar Frommhold

Journal:

Chemical Physics Letters

Year:

1985

Language:

english

File:

PDF, 381 KB

english, 1985

39

Collision-induced rototranslational absorption spectra of binary methane complexes (CH4CH4)

Aleksandra Borysow, Lothar Frommhold

Journal:

Journal of Molecular Spectroscopy

Year:

1987

Language:

english

File:

PDF, 1.36 MB

english, 1987

40

Concerning the rototranslational absorption spectra of HeCH4 pairs

Roger H. Taylor, Aleksandra Borysow, Lothar Frommhold

Journal:

Journal of Molecular Spectroscopy

Year:

1988

Language:

english

File:

PDF, 878 KB

english, 1988

41

Modelling of collision-induced absorption spectra

Aleksandra Borysow, Massimo Moraldi, Lothar Frommhold

Journal:

Journal of Quantitative Spectroscopy and Radiative Transfer

Year:

1984

Language:

english

File:

PDF, 521 KB

english, 1984

42

Dipole moments induced in three interacting molecules

Massimo Moraldi, Lothar Frommhold

Journal:

Journal of Molecular Liquids

Year:

1996

Language:

english

File:

PDF, 836 KB

english, 1996

43

Response functions of Si detectors to monoenergetic electrons and positrons in the energy range 0.8–3.5 MeV

Th. Frommhold, W. Arnold, H. Friedrichs, R. Göbel, R.D. Heil, U. Kneissl, U. Seemann, F. Steiper, C. Kozhuharov

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1991

Language:

english

File:

PDF, 786 KB

english, 1991

44

Rates of radiative recombination to form HD+ and HeH+

Lothar Frommhold, Herbert M. Pickett

Journal:

Chemical Physics

Year:

1978

Language:

english

File:

PDF, 488 KB

english, 1978

45

Concerning the anisotropy of the polarizability tensor of pairs of methane molecules

Michael H. Proffitt, Lothar Frommhold

Journal:

Chemical Physics

Year:

1979

Language:

english

File:

PDF, 394 KB

english, 1979

46

Quantum sum formulae for the collision-induced spectroscopies: Molecular systems as H2-H2

Massimo Moraldi, Aleksandra Borysow, Lothar Frommhold

Journal:

Chemical Physics

Year:

1984

Language:

english

File:

PDF, 803 KB

english, 1984

47

Total photofission cross section for 238U as a substitute for the photon absorption cross section in the energy range of the first baryon resonances

Th. Frommhold, F. Steiper, W. Henkel, U. Kneissl, J. Ahrens, R. Beck, J. Peise, M. Schmitz

Journal:

Physics Letters B

Year:

1992

Language:

english

File:

PDF, 277 KB

english, 1992

48

Mass dependence of fragment angular distributions in the fission of 232Th and 236U induced by polarized photons

F. Steiper, Th. Frommhold, W. Henkel, A. Jung, U. Kneissl, R. Stock

Journal:

Nuclear Physics A

Year:

1993

Language:

english

File:

PDF, 1.31 MB

english, 1993

49

Measurement of Townsend's first ionization coefficient α in time resolved avalanche studies in oxygen

L. Frommhold, D.W. Goodson, R.J. Corbin

Journal:

Physics Letters A

Year:

1973

Language:

english

File:

PDF, 184 KB

english, 1973

50

Effect of film structure on the electrochemical properties of gold electrodes for neural implants

Andreas Frommhold, Edward Tarte

Journal:

Electrochimica Acta

Year:

2011

Language:

english

File:

PDF, 1.46 MB

english, 2011

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